Non-volatile semiconductor memory device and its manufacturing method

ABSTRACT

In a non-volatile semiconductor memory device and a method for manufacturing the device, each memory cell and its select Tr have the same gate insulating film as a Vcc Tr. Further, the gate electrodes of a Vpp Tr and Vcc Tr are realized by the use of a first polysilicon layer. A material such as salicide or a metal, which differs from second polysilicon (which forms a control gate layer), may be provided on the first polysilicon layer. With the above features, a non-volatile semiconductor memory device can be manufactured by reduced steps and be operated at high speed in a reliable manner.

BACKGROUND OF THE INVENTION

This invention relates to a non-volatile semiconductor memory devicehaving a double-layer gate structure which includes a gate insulatingfilm, a floating gate layer as a charge storing layer, an insulatingfilm, and a control gate layer. It also relates to a method formanufacturing the device. More particularly, the invention relates to astructure which includes gate insulating films and gate electrodesincorporated in a memory cell section and its peripheral circuitsection.

Non-volatile semiconductor memory devices each comprise a memory cell (amemory cell transistor), a select transistor, and a peripheral circuitincluding a transistor of a high breakdown voltage (Vpp) and atransistor operable with a normal power Vcc (the transistors of theperipheral circuit will hereinafter be referred to as “peripheralcircuit transistors”). These transistors have gate insulating films ofdifferent thicknesses corresponding to voltages applied thereto.

FIGS. 36A, 36B and FIGS. 37A and 37B are sectional views, illustratingthe conventional steps of manufacturing a nonvolatile semiconductormemory device. As is shown in FIG. 36A, N-well regions 302 and P-wellregions 303 are formed in a silicon substrate 301, and then sufficientlythick element isolating films 304 are formed by the LOCOS method.Element regions isolated by the element isolating films 304 include, forexample, a memory cell section, a select transistor (select Tr), andtransistors incorporated in a memory peripheral circuit, such as a highbreakdown voltage transistor (Vpp Tr) and a normal power transistor (VccTr). First, a gate oxide film 305 is formed for the select Tr. Then,resist is coated and patterned, thereby covering the region other than amemory cell section with a resist layer 315, removing the gate oxidefilm 305 and forming a gate oxide film 306 for the memory cell section.In FIGS. 36 and 37, each gap indicates that the memory cell and theselect Tr, Vpp Tr and Vcc Tr show different sections.

Referring then to FIG. 36B, a polysilicon layer 307 as a first layer isdeposited on the resultant structure and then patterned. Thereafter, aninsulating film 308 is formed on each of the patterned polysiliconlayers. The polysilicon layers 307 serve as the floating gate of thememory cell and the gate electrode of the select transistor. On thetransistor (Vpp Tr, Vcc Tr) side of the peripheral circuit, theinsulating film 308, the polysilicon layer 307 as the first layer, andthe gaze insulating film 305 below the layer 307 are removed.Thereafter, the resist is patterned, thereby forming a gate oxide film309 in the Vpp Tr section. Further, another resist layer 316 ispatterned as shown in FIG. 36B, thereby removing the gate oxide film 309in the Vcc Tr section.

Subsequently, as shown in FIG. 37C, a gate oxide film 310 is formed inthe Vcc Tr section, and then a polysilicon layer (gate electrode) 311 asa second layer is formed. Thereafter, the memory cell section and eachtransistor section are patterned, ion implantation is performed, aninterlayer insulating film 312 is deposited, and wiring layers 313 areformed. Thus, a memory cell, a select transistor, a high breakdownvoltage transistor and a Vcc transistor are formed as shown in FIG. 37D.

In the above-described structure, the four gate oxide films 365, 306,309 and 310 of the transistors are formed in different steps. Therefore,a great number of resist forming steps, oxidation steps, etc. arerequired, resulting in an increase in manufacturing cost.

Moreover, as described above, in the non-volatile semiconductor memorydevice having a memory cell section of a double-layer gate structureconsisting of a floating gate layer (first polysilicon layer 307) and acontrol gate layer (second polysilicon layer 311), the gate electrodesof the transistors in the peripheral circuit are usually realized by theuse of the control gate layer (second polysilicon layer 311) in thememory cell section. If in this case, surface-channel type N-channel andP-channel MOS transistors are formed as the transistors of theperipheral circuit, the following difficulties will occur:

In general, the control gate layer of a memory cell transistor has apolycide structure formed by depositing, for example, WSi (tungstensilicide) on the second polysilicon layer to increase the conductivity.Then, the control gate layer is coated with resist and then patternedinto a gate electrode.

In the conventional method using the control gate layer as the gates ofthe transistors of the peripheral circuit, it is necessary before thedeposition of WSi to correctly implant each of N-type and P-typeimpurities into the second polysilicon layer, in order to form N-channeland P-channel MOS transistors of surface-channel type suitable forintegration. Then, it is necessary to deposit WSi, and to correctlyimplant each of N-type and P-type impurities into regions which willserve as source and drain regions, after the gate electrode is formed.Thus, the step of patterning resist and the step of implantingimpurities must be repeated.

If, on the other hand, the gate electrodes of the transistors of theperipheral circuit are formed of the first polysilicon layer 307 whichwill serve as the floating gate layer of the memory cell, asurface-channel type element can be obtained by implanting, into thegate electrode, an impurity of the same conductivity as that of animpurity implanted in the source and drain regions, after the gateelectrode is formed. In this case, however, the high speed operation ofthe transistors of the peripheral circuit cannot be realized, since thefirst polysilicon layer 307 as the floating gate layer usually has ahigher resistance than the second polysilicon layer 311 as the controlgate layer.

As explained above, in the conventional method, the transistors of theperipheral circuits have gate insulating films of different thicknesses,which inevitably increases the manufacturing steps and hence themanufacturing cost. To achieve high speed operation, the gate of eachtransistor of the peripheral circuit of the memory usually has the samepolycide structure as the control gate layer of the memory cell section.If a surface-channel type element is realized by the transistor with thegate of the polycide structure, a great number of resist patterningsteps and impurity implanting steps are required, thereby increasing themanufacturing cost.

BRIEF SUMMARY OF THE INVENTION

The present invention has been developed in light of the abovecircumstances, and is aimed at providing a non-volatile semiconductormemory device which can be manufactured by a small number of steps, anda method of manufacturing the device. The invention is also aimed atproviding a non-volatile semiconductor memory device which can bemanufactured by a small number of steps and operate at a high speed in ahighly reliable manner, and a method for manufacturing the device.

According to a first aspect of the invention, there is provided anon-volatile semiconductor memory device comprising: a plurality ofmemory cell units each including at least one memory cell formed bystacking a charge storing layer and a control gate layer above asemiconductor substrate in which data is programmed and erased bycharging and discharging the charge storing layer; a plurality of selecttransistors each connected to a corresponding one of the memory cellunits; and first and second transistors each for controlling a voltageto be applied to at least one of the memory cells and the selecttransistor connected thereto, the first transistor having a first gateinsulating film, and the second transistor having a second gateinsulating film with a different thickness from the first gateinsulating film, wherein a gate insulating film incorporated in thememory cell, a gate insulating film incorporated in the selecttransistor and the first gate insulating film are formed ofsubstantially the same film.

In the non-volatile semiconductor memory device according to the firstaspect of the present invention, the second gate insulating film may bethicker than the first insulating film.

According to a second aspect of the invention, there is provided anon-volatile semiconductor memory device comprising: a plurality ofmemory cell units each including at least one memory cell formed bystacking a charge storing layer and a control gate layer above asemiconductor substrate in which data is programmed and erased bycharging and discharging the charge storing layer; a plurality of selecttransistors each connected to a corresponding one of the memory cellunits; and first and second transistors each for controlling a voltageto be applied to at least one of the memory cells and the selecttransistor connected thereto, the first transistor having a first gateinsulating film, and the second transistor having a second gateinsulating film with a different thickness from the first gateinsulating film, wherein a gate insulating film incorporated in thememory cell and the first gate insulating film are formed substantiallythe same film, and a gate insulating film incorporated in the selecttransistor and the second gate insulating film may be formed ofsubstantially the same film.

In the non-volatile semiconductor memory device according to the secondaspect of the present invention, the second gate insulating film may bethicker than the first insulating film.

According to a third aspect of the invention, there is provided anon-volatile semiconductor memory device comprising: a plurality ofmemory cell units each including at least one memory cell formed bystacking a charge storing layer and a control gate layer above asemiconductor substrate in which data is programmed and erased bycharging and discharging the charge storing layer; a plurality of selecttransistors each connected to a corresponding one of the memory cellunits; and first and second transistors each for controlling a voltageto be applied to at least one of the memory cells and the selecttransistor connected thereto, the first transistor having a first gateinsulating film, and the second transistor having a second gateinsulating film with a different thickness from the first gateinsulating film, wherein a gate insulating film incorporated in theselect transistor and the second gate insulating film are formed ofsubstantially the same film.

In the non-volatile semiconductor memory device according to the thirdaspect of the present invention, the second gate insulating film may bethicker than the first insulating film.

In the non-volatile semiconductor memory device according to the thirdaspect of the present invention, the second gate insulating film may bethinner than the first insulating film.

According to a fourth aspect of the invention, there is provided anon-volatile semiconductor memory device comprising: a memory cellhaving a self-aligned double-layer gate structure which includes a gateinsulating film, a first conductor serving as a floating gate layer, asecond conductor serving as a control gate layer, and an insulating filmelectrically insulating the first and second conductors, the gateinsulating film, the first conductor, the second conductor and theinsulating film being formed above a semiconductor substrate; and atransistor having a gate electrode which is formed above thesemiconductor substrate and has a structure wherein a third conductordiffering from the second conductor is stacked on the first conductor.

In the non-volatile semiconductor memory device according to the fourthaspect of the present invention, the gate insulating film of the memorycell and a gate insulating film incorporated in the transistor may beformed of substantially the same film.

In the non-volatile semiconductor memory device according to the fourthaspect of the present invention, the third conductor may have aresistance lower than the first conductor.

In the non-volatile semiconductor memory device according to the fourthaspect of the present invention, the first conductor included in thegate electrode may have a conductivity type identical to that of sourceand drain regions incorporated in the transistor, and the transistor mayhave a salicide structure.

In the non-volatile semiconductor memory device according to the fourthaspect of the present invention, the third conductor may be a metal.

In the non-volatile semiconductor memory device according to the fourthaspect of the present invention, the first conductor may be one selectedfrom the group consisting of monocrystalline silicon, polysilicon andamorphous silicon.

In the non-volatile semiconductor memory device according to the fourthaspect of the present invention, the non-volatile semiconductor memorydevice may further comprise a resistive element with the double-layergate structure, the resistive element including the first conductor usedas a resistor, the second conductor and the insulating film havingportions thereof removed from a region of the first conductor, and thethird conductor provided on the region of the first conductor. Theregion of the first conductor on which the third conductor may be formedserves as a contact region in the resistive element.

In the non-volatile semiconductor memory device according to the fourthaspect of the present invention, the non-volatile semiconductor memorydevice may further comprise an element isolating region adjacent to thetransistor, and a pattern with the double-layer gate structure providedon the element isolating region.

According to a fifth aspect of the invention, there is provided a methodof manufacturing a non-volatile semiconductor memory device, comprisingthe steps of: forming, on a first region of a semiconductor substrate, aself-aligned double-layer gate structure which includes a gateinsulating film, a first conductor serving as a floating gate layer, asecond conductor serving as a control gate layer, and an insulating filmelectrically insulating the first and second conductors, patterning thefirst conductor into a gate electrode of a transistor above a secondregion of the semiconductor substrate; and providing a third conductoron the first conductor patterned in the form of the gate electrode abovethe second region.

In the non-volatile semiconductor memory device according to the fifthaspect of the present invention, the method of manufacturing anon-volatile semiconductor memory device may further comprise the stepsof forming an element isolating region adjacent to the transistor, andforming the double-layer gate structure on the element isolating region.

According to a sixth aspect of the invention, there is provided a methodof manufacturing a non-volatile semiconductor memory device, comprisingthe steps of: sequentially forming, on a semiconductor substrate, a gateinsulating film, a first conductor serving as a floating gate layer, aninsulating film, and a second conductor serving as a control gate layer;patterning the second conductor, the insulating film and the firstconductor in a self-aligned manner in a first region of thesemiconductor substrate, using a single mask, thereby forming adouble-layer gate structure, and removing that portion of the secondconductor which is provided on a second region of the semiconductorsubstrate during the patterning of the second conductor in the firstregion; forming a third conductor on the first conductor in the secondregion after the patterning of the first conductor in the first region,such that the first and third conductors are electrically connected toeach other; and patterning the third and first conductors into a gateelectrode of a transistor in the second region.

In the non-volatile semiconductor memory device according to the sixthaspect of the present invention, the non-volatile semiconductor memorydevice may further comprise the steps of forming an element isolatingregion adjacent to the transistor, and forming the double-layer gatestructure on the element isolating region.

Additional object and advantages of the invention will be set forth inthe description which follows, and in part will be obvious from thedescription, or may be learned by practice of the invention. The objectand advantages of the invention may be realized and obtained by means ofthe instrumentalities and combinations particularly pointed outhereinafter.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWING

The accompanying drawings, which are incorporated in and constitute apart of the specification, illustrate presently preferred embodiments ofthe invention, and together with the general description given above andthe detailed description of the preferred embodiments given below, serveto explain the principles of the invention.

FIG. 1 is a sectional view, showing a non-volatile semiconductor memorydevice according to a first embodiment of the invention;

FIGS. 2A-2C are sectional views, illustrating in order steps of aprocess for manufacturing the structure of FIG. 1;

FIG. 3 is a sectional view, showing a first modification of the firstembodiment of the invention;

FIG. 4A is a sectional view, showing a second modification of the firstembodiment of the invention;

FIG. 4B is a sectional view, showing a third modification of the firstembodiment of the invention;

FIGS. 5A-5C are first sectional views, each showing an essential part ofa non-volatile semiconductor memory device according to a secondembodiment, which are seen in a process step;

FIGS. 6A-6C are second sectional views, each showing an essential partof the non-volatile semiconductor memory device according to the secondembodiment, which are seen in a process step;

FIGS. 7A-7C are third sectional views, each showing an essential part ofthe non-volatile semiconductor memory device according to the secondembodiment, which are seen in a process step;

FIGS. 8A-8C are fourth sectional views, each showing an essential partof the non-volatile semiconductor memory device according to the secondembodiment, which are seen in a process step;

FIGS. 9A-9C are fifth sectional views, each showing an essential part ofthe non-volatile semiconductor memory device according to the secondembodiment, which are seen in a process step;

FIGS. 10A-10C are sixth sectional views, each showing an essential partof the non-volatile semiconductor memory device according to the secondembodiment, which are seen in a process step;

FIGS. 11A-11C are seventh sectional views, each showing an essentialpart of the non-volatile semiconductor memory device according to thesecond embodiment, which are seen in a process step;

FIGS. 12A-12C are eighth sectional views, each showing an essential partof the non-volatile semiconductor memory device according to the secondembodiment, which are seen in a process step;

FIGS. 13A-13C are ninth sectional views, each showing an essential partof the non-volatile semiconductor memory device according to the secondembodiment, which are seen in a process step;

FIGS. 14A-14C are tenth sectional views, each showing an essential partof the non-volatile semiconductor memory device according to the secondembodiment, which are seen in a process step;

FIGS. 15A-15C are eleventh sectional views, each showing an essentialpart of the non-volatile semiconductor memory device according to thesecond embodiment, which are seen in a process step;

FIG. 16A is a sectional view, showing a part of a non-volatilesemiconductor memory device, which is seen in a process step;

FIG. 16B is a sectional view, showing a part of a non-volatilesemiconductor memory device, which is seen in a process step;

FIG. 16C is a sectional view, showing a part of the non-volatilesemiconductor memory device, which is seen in a process step;

FIG. 17 is a sectional view, showing an essential part according to athird embodiment of the invention;

FIGS. 18A-18C are first sectional views, each showing an essential partof a non-volatile semiconductor memory device according to a fourthembodiment, which are seen in a process step;

FIGS. 19A-19C are second sectional views, each showing an essential partof the non-volatile semiconductor memory device according to the fourthembodiment, which are seen in a process step;

FIGS. 20A-20C are first sectional views, each showing an essential partof a non-volatile semiconductor memory device according to a fifthembodiment, which are seen in a process step;

FIGS. 21A-21C are second sectional views, each showing an essential partof the non-volatile semiconductor memory device according to the fifthembodiment, which are seen in a process step;

FIG. 22 is a third sectional view, showing an essential part of thenon-volatile semiconductor memory device according to the fifthembodiment, which is seen in a process step;

FIG. 23 is a sectional view, showing a non-volatile semiconductor memorydevice according to a sixth embodiment of the invention;

FIGS. 24A-24C are sectional views, useful in explaining a method formanufacturing the structure of FIG. 23;

FIGS. 25A-25C are first sectional views, each showing an essential partof a non-volatile semiconductor memory device according to a seventhembodiment, which are seen in a process step;

FIGS. 26A-26C are second sectional views, each showing an essential partof the non-volatile semiconductor memory device according to the seventhembodiment, which are seen in a process step;

FIGS. 27A-27C are third sectional views, each showing an essential partof the non-volatile semiconductor memory device according to the seventhembodiment, which are seen in a process step;

FIGS. 28A-28C are fourth sectional views, each showing an essential partof the non-volatile semiconductor memory device according to the seventhembodiment, which are seen in a process step;

FIG. 29 is a fifth sectional view, showing an essential part of thenon-volatile semiconductor memory device according to the seventhembodiment, which is seen in a process step;

FIG. 30 is a sixth sectional view, showing those essential parts of thenon-volatile semiconductor memory device according to the seventhembodiment, which is seen in a process step;

FIG. 31 is a sectional view to be compared with FIG. 30, showing thoseessential parts of the non-volatile semiconductor memory deviceaccording to the seventh embodiment, which is seen in a process step;

FIG. 32 is a circuit diagram, showing a NAND EEPROM to which each of theembodiments of the invention is applicable;

FIG. 33 is a circuit diagram, showing a NOR EEPROM to which each of theembodiments of the invention is applicable;

FIG. 34 is a circuit diagram, showing a DINOR EEPROM to which each ofthe embodiments of the invention is applicable;

FIG. 35 is a circuit diagram, showing an AND EEPROM to which each of theembodiments of the invention is applicable;

FIGS. 36A and 36B are sectional views, useful in explaining conventionalprocess steps of manufacturing a non-volatile semiconductor memorydevice; and

FIGS. 37A and 37B are sectional views, useful in explaining conventionalprocess steps performed after the steps shown in FIGS. 36A and 36B.

DETAILED DESCRIPTION OF THE INVENTION

FIG. 1 is a sectional view, showing a non-volatile semiconductor memorydevice according to a first embodiment of the invention. As is shown inFIG. 1, N-wells 102 and P-wells 103 are selectively formed in a P-typesilicon substrate 101. In a region in which a memory cell array isformed, a P-well 103 is formed in a surface portion of an N-well 102.Thick element isolating films 104 are selectively formed on the siliconsubstrate 101 by the LOCOS method. Element regions isolated by the films104 include, for example, a memory cell region, a select transistor(select Tr) region, a high breakdown voltage transistor (Vpp Tr) region,and a normal power transistor (Vcc Tr) region. Like FIGS. 36A, 36B, 37Aand 37B, the gap in FIG. 1 indicates that the memory cell and the selectTr, Vpp Tr and Vcc Tr show different sections.

The memory cell and the select Tr has the same gate insulating film 105as the Vcc Tr. A first polysilicon layer 106 which will serve as afloating gate layer and a second polysilicon layer 107 which will serveas a control gate layer are stacked on each gate insulating film. Aninsulating film 109 is interposed between the first and secondpolysilicon layers 106 and 107. The insulating film 109 consists of, forexample, a SiO₂/Si₃N₄/SiO₂ laminated film (ONO film). In the select Tr,part of the first polysilicon layer 106 is directly connected to ametallic wire member 112 a. In the memory cell, the first polysiliconlayer (floating gate layer) 106 is a charge storing layer. Dataprogramming and erasing is performed in the first polysilicon layer whenelectricity is charged or discharged under the control of the secondpolysilicon layer (control gate layer). A single memory cell or aplurality of memory cells connected to each other constitute a memorycell unit. FIG. 1 shows a section of a memory cell arrangement in whicha single control gate (second polysilicon layer 107) is commonly used.When, for example, this invention is applied to a NAND EEPROM, apredetermined number of memory cells arranged in a directionperpendicular to that section constitute a memory cell unit. Each memorycell unit is connected to at least one select transistor (select Tr). Aplurality of memory cell units constructed as above form a memory cellarray (not shown).

The high breakdown voltage transistor (Vpp Tr) and the normal powertransistor (Vcc Tr) are used to control the voltage for controlling thememory cell and the select Tr.

A gate insulating film 108 incorporated in the Vpp Tr is thicker thanthe gate insulating film 105 of the Vcc Tr. Gate insulating filmsincorporated in the memory cell, the select Tr, and the Vcc Tr of aperipheral circuit are constituted of the gate insulating film 105formed in a single process step, which means that the gate insulatingfilms are formed of substantially the same film.

The gate electrodes of the Vpp Tr and Vcc Tr are realized by the use ofthe first polysilicon layer 106. The second polysilicon layer (controlgate layer) 107 of, for example, high impurity concentration is providedon the first polysilicon layer 106. However, the material provided onthe first polysilicon layer 106 included in the gate electrode of theVpp Tr or Vcc Tr is not limited to the second polysilicon layer (controlgate layer) 107, but may be salicide or a metal.

Openings are selectively formed in an interlayer insulating film 110provided on the entire surface of the substrate, through which ametallic wire member 112 extends and is electrically connected to thegate of the select Tr and the source/drain diffusion layers (N⁺diffusion layers, P⁺ diffusion layers).

With the above structure, the gate insulating films are commonly used,and hence omit the gate oxidation step for forming the peripheraltransistors. Accordingly, the non-volatile semiconductor memory devicecan be manufactured at low cost.

A method for manufacturing the memory device will be described.

FIGS. 2A-2C are sectional views, illustrating in order steps of aprocess for manufacturing the structure of FIG. 1. First, as is shown inFIG. 2A, the N-wells 102 and P-wells 103 are selectively formed in thesilicon substrate 101. A thick element isolating film 104 of about 300nm is formed on the silicon substrate 101 by the LOCOS method. Then, agate insulating film 108 with a thickness of, for example, 40 nm for theVpp Tr (high breakdown voltage transistor) is formed. Subsequently, theregion in which the Vpp Tr will be formed is coated with a resist layer115, thereby removing the gate insulating film 108 on the other region.Thereafter, a gate insulating film with a thickness of, for example, 8nm is formed on the region other than the region for the Vpp Tr, i.e. onthe region for the memory cell, the select Tr and the Vcc Tr.

After removing the resist layer 115, the first polysilicon layer 106 isdeposited on the gate insulating films 105 and 108 as shown in FIG. 2B.After patterning the region for the memory cell, the insulating film 109as the SiO₂/Si₃N₄/SiO₂ laminated film (ONO film) is provided on thefirst polysilicon layer 106.

Then, as is shown in FIG. 2C, the second polysilicon layer 107 isdeposited after the insulating film 109 for the transistors of theperipheral circuit is removed. Thereafter, patterning, ion implantation,deposition of an interlayer insulating film and formation of wires areperformed to constitute the FIG. 1 structure.

Since in the above embodiment, gate insulating films of the same kindare intentionally used to minimize the kinds of the entire gateinsulating films, the gate oxidation steps for forming the transistorsof the peripheral circuit are reduced. Although the embodiment employstwo kinds of gate insulating films, i.e. the gate oxide film 108 for thehigh breakdown voltage transistor and the gate oxide film 105 for theother transistors, the invention is not limited to this. For example, itmay be modified such that the same film is used or different films areused to form the gate insulating films of the memory cell and the VccTr, while the same film is used to form the gate insulating films of theselect Tr and Vpp Tr.

A modification of the non-volatile semiconductor memory device accordingto the first embodiment will be described with reference to FIGS. 3 and4A and 4B.

The FIG. 3 structure differs from the FIG. 1 structure in that the gateinsulating film of the select Tr is substantially the same as the gateinsulating film 108 of the Vpp Tr. For example, the gate insulatingfilms 108 of the select Tr and the Vpp Tr are set at a thickness of 40nm, and the gate insulating films 105 of the memory cell and the Vcc Trat a thickness of 8 nm.

The FIG. 4A structure differs from the FIG. 3 structure in that the gateinsulating films (i.e. gate insulating films 118) of the Vcc Tr differfrom the gate insulating film 105 of the memory cell. Specifically, theselect Tr and the Vpp Tr have gate insulating films 108 of 40 nm, thememory cell has a gate insulating film of 8 nm, and the Vcc Tr has gateinsulating films 118 of 12 nm.

Although in the FIG. 4A structure, the select Tr has substantially thesame gate insulating film as the Vpp Tr, it may be modified such thatthe select Tr has substantially the same gate insulating film as the VccTr, while the memory cell has a gate insulating film differing from thatof the Vpp Tr, as shown in FIG. 4B. Specifically, the Vpp Tr has a gateinsulating film 108 of 40 nm, the Vcc Tr and the select Tr have gateinsulating films 118 of 12 nm, and the memory cell has a gate insulatingfilm of 8 nm.

As in the FIG. 1 case, the gate insulating films are commonly used inthe FIGS. 3 and 4A and 4B, and thus the gate oxidation steps for formingthe transistors of the peripheral circuit are reduced. To make, inparticular, the select Tr have the same gate insulating film as thetransistors of the peripheral circuit, as described above, is veryadvantageous to optimize the gate insulating films of the transistors ofthe peripheral circuit to enable the transistors to perform high speedoperation. This is because the select transistor has less limitations incharacteristics than the memory cell transistor, and hence the degree offreedom in the thickness of each gate insulating film of the transistorsof the peripheral circuit is not reduced.

Moreover, the invention is advantageous in that the gate electrodes ofthe peripheral circuit are realized by the use of the first-conductivelayer (floating gate layer) of the memory cell, and therefore nocomplicated steps are necessary to make the transistors of theperipheral circuit operable at high speed. In other words, thetransistors of the peripheral circuit can be easily made to have asalicide structure or polymetal gates. This will be described in detailbelow.

FIGS. 5A-5C to 15A-15C are sectional views, illustrating, in order, thesteps of manufacturing a non-volatile semiconductor memory deviceaccording to a second embodiment of the invention. This non-volatilesemiconductor memory device has a double-layer gate structure in whichthe control gate incorporated therein has a polysilicon/wSi laminatedstructure. FIGS. 5A-5C to 15A-15C illustrate a structure and a methodfor making the peripheral transistors of the device operable at highspeed. In this case, the gate electrodes of the peripheral transistorsare realized by the use of the floating gate layer of the memory cell,thereby causing the transistors to have a salicide structure. Each ofFIGS. 5A, 6A, . . . 15A is a sectional view of a memory cell section,each of FIGS. 5B, 6B, . . . 15B is a sectional view of an N-channeltransistor incorporated in the peripheral circuit, and each of FIGS. 5C,6C, . . . 15C is a sectional view of a P-channel transistor incorporatedin the peripheral circuit.

First, as is shown in FIGS. 5A-5C, N-type substrate regions with N-wellsand P-type substrate regions with P-wells are formed in thesemiconductor substrate by, for example, implanting impurities. Elementisolating films 1 are formed by, for example, selective oxidation. Then,gate oxide films (insulating films) 2 are formed on activation regionsof the substrate by, for example, gate oxidation. Subsequently, a firstpolysilicon layer 3 which will serve as a floating gate layer isdeposited on the resultant structure. If necessary, an N-type impurityis doped into the polysilicon layer 3 by, for example, the phosphordiffusion method. Alternatively, a polysilicon layer 3 beforehand dopedwith an impurity may be deposited. Further, the resultant structure issubjected to working for forming, for example, cell slits in thatportion of the polysilicon layer 3 which corresponds to the memory cellsection shown in FIG. 5A (this step is not shown). More specifically,the cell slits are formed in accordance with the plan pattern of thememory cell units of the semiconductor memory device to be formed later.

Thereafter, as is shown in FIGS. 6A-6C, an insulating film (ONO film) 6consisting of, for example, a SiO₂/Si₃N₄/SiO₂ laminated film isdeposited. Then, a second polysilicon layer 7 which will serve as acontrol gate layer is deposited and then doped with an N-type impurity.Alternatively, a polysilicon layer 7 doped with an impurity may bedeposited. Subsequently, a WSi layer (not shown), for example, isdeposited on the second polysilicon layer 7. Further, an SiN film 8which will serve as a mask is deposited on the control gate orpolysilicon layer 7 in order to increase the conductivity of the controlgate layer.

Thereafter, a resist layer 9 is coated and patterned as shown in FIGS.7A-7C. The SiN film 8 is etched by anisotropic etching (in the memorycell section), and then the resist layer is removed. Referring then toFIGS. 8A-8C, the control gate layer (polysilicon layer) 7 and then theONO film 6 are etched by anisotropic etching, using the SiN film 8 as amask. At this time, the memory cell section has a structure as shown inFIG. 8A in which the films 8-6 are treated for the formation of a gateelectrode, while the peripheral sections have structures as shown inFIGS. 8B and 8C, in which the floating gate layer is exposed.

Subsequently, as shown in FIGS. 9A-9C, a resist layer 10 is coated andpatterned. Then, the floating gate layer (first polysilicon layer 3) isetched by anisotropic etching, using the SiN film 8 and the resist layer10 as masks in the memory cell section and the peripheral sections,respectively, as shown in respective FIGS. 9A-9C. Then, the resist layer10 is removed.

Referring then to FIGS. 10A-10C, resist is coated, and patterned into aresist layer 11 such that the N-channel transistors in the memory cellsection and the peripheral section are exposed as shown in FIGS. 11A and10B, thereby doping an N-type impurity which will serve as N− of an LDD(Lightly Doped Drain), and removing the resist layer 11.

Referring to FIGS. 11A-11C, resist is coated, and patterned into aresist layer 12 such that the P-channel transistor in the peripheralsection is exposed as shown in FIG. 11C. Then, a P-type impurity whichwill make a P-region of the LDD is implanted, and the resist layer 12 isremoved.

Referring then to FIGS. 12A-12C, an SiN film is deposited, and etched byanisotropic etching such that it remains on the side walls of thetransistors in the memory cell and the peripheral circuit as SiN films13. Then, resist is coated, and patterned into a resist layer 14 suchthat the P-channel transistor in the peripheral section is exposed asshown in FIG. 12C. Thereafter, a P-type impurity is implanted and theresist layer 14 is removed.

Referring then to FIGS. 13A-13C, resist is coated, and patterned into aresist layer 15 such that the N-channel transistors in the memory cellsection and the peripheral sections are exposed. Then, an N-typeimpurity is implanted and the resist layer 15 is removed.

Then, as shown in FIGS. 14A-14C, the oxide films (insulating films) 2 onthe source and drain regions of each transistor are removed, therebyexposing silicon. Subsequently, a Ti/TiN film 16, for example, isdeposited by sputtering, and made to react with silicon by annealing athigh temperature. Thereafter, non-reacted portions of the Ti/TiN filmare removed, and high-temperature annealing is performed again, therebyforming a silicide film 17 and realizing a salicide structure, as shownin FIGS. 15A-15C.

Thus, the source, drain and gate of each transistor in the memory cellsection and the peripheral sections are completed as shown in FIGS.15A-15C. The silicide film 17, which has come to the salicide structure,has a lower sheet resistance and hence a lower resistivity than thepolysilicon layer 3 located below. This enables construction of ahigh-speed CMOS circuit.

Thereafter, various steps (which are not shown) of depositing aninterlayer insulating film, forming contact holes and wiring layers,depositing a protect film, etc. are performed. As a result, thenon-volatile semiconductor memory device is completed.

If the element structure must be flattened for integration, a dummypattern DMY of the same double-layer gate structure as the memory cellis formed on the element isolating region near the peripheraltransistors, as is shown in FIG. 16A.

As is shown in FIG. 16B, an interlayer insulating film, for example, isformed on an element structure. This interlayer insulating film ispolished and flattened by, for example, CMP. If at this time, thedistance between each pair of adjacent dummy patterns DMY, i.e. thepitch at which dummy patterns DMY are arranged, is too great, thoseportions of the interlayer insulating film which are situated betweeneach pair of adjacent dummy patterns are liable to be polishedexcessively as shown in FIG. 16C. In light of this, it is preferablethat the pitch of the dummy patterns. DMY is determined on the basis ofthe to-be-polished material (in this case, the material of theinterlayer insulating film) and polishing conditions (the kind ofpolishing slurry, the rotation speed of a polishing pad, etc.), so as toavoid the aforementioned excessive polishing. In other words, it isdesirable that the dummy patterns DMY be arranged at appropriateintervals so that the to-be-polished material between each pair ofadjacent dummy patterns DMY will not excessively be polished.

Since in the second embodiment, a single oxide film is used between thetransistors of the memory cell section and the peripheral sections, thenumber of steps of resist forming, oxidation, etc. can be reduced. Ifthe second embodiment includes a select transistor in the memory cellsection and a high breakdown voltage transistor in the peripheralcircuit (which are not shown), a single gate insulating film thickerthan the gate oxide film (insulating film) 2 may be used to realize thetransistors. Alternatively, it may be modified, as in the firstembodiment, such that only the high breakdown voltage transistor has agate insulating film which differs from the gate oxide film 2, and theselect transistor of the memory cell has the gate oxide film 2. Anycombination of gate insulating films may be employed if it can reducethe manufacturing steps such as the oxidation step, as compared with theconventional case.

Moreover, since the second embodiment uses the first polysilicon layer(floating gate layer) to form the gate electrodes of the transistors ofthe peripheral circuit, thereby employing the salicide structure,surface-channel type MOS transistors can be formed irrespective ofwhether or not WSi is deposited on the control gate layer. In otherwords, in FIGS. 10B and 10C-FIGS. 13B and 13C, the same impurity as inthe source and drain regions of both P-channel MOS transistors isimplanted into the gate thereof, thereby converting the transistors intosurface-channel type ones, and then causing them to have a salicidestructure as shown in FIGS. 15A-15C. Accordingly, a highly performablenon-volatile semiconductor memory device whose peripheral transistorsare operable at a high speed can be achieved by a manufacturing methodwhich prevents the process of implanting impurities from beingcomplicated. The metal to be sputtered onto silicon to obtain thesalicide structure is not limited to Ti/TiN.

FIG. 17 is a sectional view, showing a third embodiment of theinvention. In this embodiment, the floating gate layer (the firstpolysilicon layer 3) is used to form a resistive element of highresistance. In the non-volatile semiconductor memory device of thedouble-layer gate structure according to the third embodiment, thefloating gate layer of the memory cell is used to realize the gateelectrodes of the transistors in the peripheral circuit, and alsorealize resistive elements of high resistance in the peripheral elementportion.

Specifically, as in the second embodiment, the floating gate layer isformed as in the second embodiment (FIGS. 5A-5C). Then, if necessary, animpurity is implanted into the region of the peripheral section of thememory cell, wherein a resistive element is formed. In other words,resist is coated, and patterned such that the region of the peripheralsection wherein a resistive element is formed is exposed. Then, adesired impurity is implanted into the region and the resist is removed.

Subsequently, as in the second embodiment, a structure as shown in FIGS.6A-6C is formed, in which the SiN film 8 on the control gate layer 7 isthe uppermost layer. Thereafter, resist his coated on the memory cellsection and the resistive element and then patterned, thereby etchingthe SiN film 8 by anisotropic etching (these steps are not shown).Concerning the resistive element, the resist is patterned such that itremains on a portion of the resistive element other than a portion to beused as a contact.

Then, as in the second embodiment, the SiN film 8 is used as a mask toetch the control gate layer and the ONO film by anisotropic etching, andthe resist is removed. In the following steps which are not shown,resist is coated and patterned, and then the floating gate layer isetched by anisotropic etching, using, as masks, those portions of theresist provided on the gate electrodes of the peripheral transistors andon the contact portion of the resistive element, and those portions ofSiN provided in the memory cell section and on the other portion of theresistive element. Then, the resist is removed.

Moreover, as in the second embodiment, the source and drain regions ofeach transistor are formed, and then salicide is formed.

From the above-described steps, the source, drain and gate of eachtransistor as shown in FIGS. 15A-15C and a resistive element as shown inFIG. 17 are completed. Thereafter, an interlayer insulating film 19 isdeposited, and various steps of forming contact holes and wiring layers,depositing a protect film, etc. are performed. As a result, thenon-volatile semiconductor memory device is completed.

FIG. 17 also shows an interlayer insulating film 19 and a metallic wire20 formed in the step. The remaining second polysilicon layer 7 providesa level which is substantially the same as the peripheral elementstructure, which contributes to the flattening of the interlayerinsulating film 19.

If the element structure must be flattened for integration, a dummypattern DMY (as shown in FIG. 16A) of the same double-layer gatestructure as the memory cell is formed on the element isolating regionnear the peripheral transistors.

The metal to be sputtered onto silicon to obtain the salicide structureis not limited to Ti/TiN.

The formation of the gate electrodes of the transistors and theresistive element, which are incorporated in the peripheral circuit, maybe performed after the formation of the memory cell, instead ofsimultaneous formation of them.

Referring then to FIGS. 18A-18C and 19A-19C and part of the secondembodiment, a method, according to a fourth embodiment, for formingfirst the memory cell and then the gate electrodes of the transistorsand the resistive element, which are incorporated in the peripheralcircuit, will be described.

First, in the memory section, etching is performed down to the ONO film6 or to the second polysilicon layer 7 as shown in FIG. 8A, as in thecase of the second embodiment. At this time, in the resistive element,etching is performed down to the ONO film 6 or to the second polysiliconlayer 7 as in the case of the third embodiment (these steps are notshown).

After the gates are formed, a resist layer 31 is formed in thetransistor sections of the peripheral circuit as shown in FIGS. 18B and18C. Then, the floating gate layer (the first polysilicon layer 3) inthe memory cell section is etched by anisotropic etching, therebyremoving the resist layer 31.

Thereafter, as is shown in FIGS. 19A-19C, a resist layer 32 is coatedand patterned, thereby etching the floating gate layer in the peripheralsections by anisotropic etching (FIGS. 19B and 19C). At this time, inthe resistive element, the floating gate layer is etched by anisotropicetching, using the resist layer 32 as a mask in the contact region, andalso using the SiN film as a mask in the remaining region (these stepsare not shown). Thereafter, the resist layer 32 is removed. Furthermore,as in the second embodiment, the source and drain regions of eachtransistor are formed, and then salicide is formed. FIGS. 18 and 19 showan example in which when a gate is formed in the memory section, etchingis performed down to the second polysilicon layer 7 in the peripheralsections. In this example, the ONO film 6 remaining on each gate isremoved when the oxide film (insulating film) 2 on the source and drainregions are removed before the formation of the salicide structure.

After the above-described steps, the source drain and gate of eachtransistor and the resistive element are completed as shown in FIGS.15A-15C and 17, respectively. Then, various steps of depositing aninterlayer insulating film, forming contact holes and wiring layers,depositing a protect film, etc. are performed. As a result, thenon-volatile semiconductor memory device is completed. FIG. 17 alsoshows an interlayer insulating film and wiring, which are formed insteps performed later.

If the element structure must be flattened for integration, a dummypattern DMY of the same double-layer gate structure as the memory cellis formed on the element isolating region near the peripheraltransistors, as is shown in FIG. 16A.

The metal to be sputtered onto silicon to form the salicide structure isnot limited to Ti/TiN.

Referring to FIGS. 20A-20C and 21A-21C and part of the fourthembodiment, a fifth embodiment will be described. This embodiment issimilar to the fourth embodiment in that the floating gate layer of thememory cell is used to realize the gate electrodes of the peripheraltransistors, but differs from it in that the gate electrodes are formedof polymetal gates each of which consists of, for example, polysiliconand W and enables high-speed operation of the peripheral transistors.

A method will be described, which is used in the fifth embodiment forforming the gate electrodes of the peripheral transistors and theresistive element after the formation of the memory cell section.

As in the fourth embodiment, a structure as shown in FIGS. 18A-18C isformed. Then, an N-type impurity is implanted into the memory cellsection shown in FIG. 18A to form source and drain regions therein, andthereafter the resist layer 31 is removed.

If it is necessary to form an LDD structure, an N-type impurity of acertain concentration, which will serve as N⁻ of the LDD structure, isimplanted during the step of implanting the N-type impurity. In thefollowing steps which are not shown, an SiN film is deposited, resist iscoated and patterned such that the memory cell section is exposed, theSiN film is etched by anisotropic etching such that it remains on thegate side walls of the memory cell, an N-type impurity of an impurityconcentration higher than the N⁻ is implanted, and the resist layer 31is removed.

In the following steps which are not shown, SiN is deposited, resist iscoated and patterned, SiN and the ONO film 6 in the peripheral sectionsare removed by etching, the resist is removed, and the memory cellsection is protected by an SiN film 24 (shown in FIG. 20A).

Thereafter, a W film 18, for example, is deposited, and resist is coatedand patterned into resist layers 32, as is shown in FIGS. 20A-20C.Subsequently, the W film 18 and the floating gate layer (the firstpolysilicon layer) 3 in the peripheral sections are sequentially etchedby anisotropic etching, using the resist layers 32 as masks. Then, theresist layers 32 are removed.

Then, as in the second embodiment, source and drain regions are formedin the peripheral sections, with the result that the source, drain andgate of the transistors are completed, as shown in FIGS. as is shown inFIGS. 21A-21C.

If the element structure must be flattened for integration, a dummypattern DMY (as shown in FIG. 22) of the same double-layer gatestructure as the memory cell is formed on the element isolating regionnear the peripheral transistors.

Thereafter, various steps of depositing an interlayer insulating film,forming contact holes and wiring layers, depositing a protect film, etc.are performed. As a result, the non-volatile semiconductor memory deviceis completed. The metal for forming polymetal gates is not limited to W.It suffices if the metal has a sheet resistance and resistivity lowerthan the first polysilicon layer 3. Since as described above, the gateelectrodes of the peripheral transistors are not formed simultaneouswith the gate electrode of the memory cell section in the fourth andfifth embodiments, the number of steps required for forming the gateelectrodes of the transistors is slightly greater than in the firstthrough third embodiments. However, in the fourth and fifth embodiments,the steps required for gate oxidation for forming the peripheraltransistors, and accordingly the manufacturing steps, can be reduced tosome extent, since the first conductive layer (the floating gate layer)of the memory cell is also used to form the gate electrodes of theperipheral circuit, which means that gate insulating films of the samekind are intentionally used between the memory cell transistor, or theselect transistor, and the peripheral transistors.

Although the first through fifth embodiments employ selective oxidationsuch as the LOCOS method, as a method for isolating element, theinvention is not limited to it. The STI (Shallow Trench Isolation)technique, for example, may be used instead. This method will bedescribed below.

FIG. 23 shows a non-volatile semiconductor memory device according to asixth embodiment of the invention. This embodiment differs from the FIG.1 embodiment in that the former uses element isolating films formed bythe STI technique, and also in that in the former, a WSi film 201 isdeposited on the second polysilicon layer 107 as the control gate layerof the memory cell section, and the gate electrodes of the peripheraltransistors (Vpp Tr, Vcc Tr) each have a polymetal structure constitutedof the first polysilicon layer 106 and a W (tungsten) layer 202 providedthereon.

In the sixth embodiment, gate insulating films of two kinds areemployed, which include the gate insulating films 105 used in the memorycell transistor, the select Tr and the Vcc Tr, and the gate insulatingfilm 108 used in the high breakdown voltage transistor (Vpp Tr), as inthe first embodiment.

Since in the above structure, the kinds of gate insulating films areintentionally reduced, as in the first embodiment, the gate oxidationsteps for forming the peripheral transistors can be reduced, with theresult that the non-volatile semiconductor memory device can bemanufactured at low cost. A method for manufacturing this device will bedescribed.

FIGS. 24A-24C are sectional views, illustrating, in order, the steps ofmanufacturing the FIG. 23 structure.

First, as is shown in FIG. 24A, N-wells 102 and P-wells 103 areselectively formed in a silicon substrate 101. Subsequently, a gateinsulating film 108 with a thickness of, for example, 40 nm is formedfor a Vpp Tr (high breakdown voltage transistor) in the substrate 101.Then, a resist layer 215 is coated on a region in which the Vpp Tr willbe formed, thereby removing that portion of the gate insulating film 108which is not coated with the resist layer.

Thereafter, as is shown in FIG. 24B, a gate insulating film 105 with athickness of, for example, 8 nm is formed on the region other than theregion for the Vpp Tr, i.e. the region for the memory cell, the selectTr, and the Vcc Tr. After the resist layer 215 is removed, a firstpolysilicon layer 106 is deposited on the gate insulating films 105 and108. Then, a resist layer 216 is deposited on the first polysiliconlayer 106 and patterned in accordance with to-be-isolated elements.Using the patterned resist layer 216 as a mask, trenches 217 are formedby the STI method such that they reach the substrate.

Then, as is shown in FIG. 24C, the trenches 217 are filled withinsulating films 218 formed of, for example, TEOS (tetraethoxysilane).Subsequently, an insulating film 109 consisting of a SiO₂/Si₃N₄/SiO₂laminated film (ONO film) is formed on the insulating film 218 and thefirst polysilicon layer 106. Those portions of the insulating film 109which are provided on the select Tr, the Vpp Tr and the Vcc Tr of theperipheral circuit are removed, and then a laminated layer of a secondpolysilicon layer 107 and a WSi layer 201 is deposited. Thereafter, inthe following steps which are not shown, resist is coated and patterned,thereby removing those portions of the second polysilicon layer 107 andthe WSi layer 201 which are provided on the transistor sections of theperipheral circuit.

Further, in the following steps which are not shown, the gates of thememory cell and the select Tr are formed, and ions are implanted intothe source and drain regions of the memory cell and the select Tr.Subsequently, the memory cell and the select Tr are masked, and a Wlayer 202 is deposited on those portions of the first polysilicon layer106 which are coated on the Vpp Tr and the Vcc Tr of the peripheralcircuit. Then, resist is coated and patterned, thereby etching first theW layer 202 and then the first polysilicon layer 106 by anisotropicetching. Thereafter, the steps of forming the source and drain regionsof the Vpp Tr and Vcc Tr of the peripheral circuit, forming the entirewiring, etc. are performed. As a result, the FIG. 23 structure isobtained.

Also in this embodiment, the kinds of gate insulating films areintentionally reduced, thereby reducing the gate oxidation steps forforming the transistors of the peripheral circuit. This embodiment maybe modified, for example, such that the memory cell transistor has thesame gate insulating film as the Vcc Tr, while the select Tr has thesame gate insulating film as the Vpp Tr.

Moreover, since the gate electrodes of the peripheral circuit arerealized by the use of the first conductive layer (the floating gatelayer) of the memory cell, no complicated step is necessary to make thetransistors of the peripheral circuit operable at high speed. Adescription will be given of a case where the transistors of theperipheral circuit have a salicide structure.

FIGS. 25A-25C to 28A-28C are sectional views, illustrating, in order,the steps of manufacturing a non-volatile semiconductor memory deviceaccording to a seventh embodiment. This embodiment useselement-isolating films formed by the STI (Shallow Trench Isolation)technique. The memory device of this embodiment has a double-layer gatestructure in which the control gate has a laminated structure of, forexample, polysilicon and WSi, and the gate electrodes of the peripheraltransistors are formed using the floating gate of the memory cell,thereby making the transistors have a salicide structure which enableshigh speed operation of them. Each of FIGS. 25A, 26A, 27A and 28A is asectional view of a memory cell section, each of FIGS. 25B, 26B, 27B and28B is a sectional view of an N-channel transistor incorporated in theperipheral circuit, and each of FIGS. 25C, 26C, 27C and 28C is asectional view of a P-channel transistor incorporated in the peripheralcircuit.

First, as is shown in FIG. 25A-25C, N-type substrate regions withN-wells and P-type substrate regions with P-wells are formed in thesemiconductor substrate by implanting impurities. Then, gate oxide films(insulating films) 2 are formed on the substrate by, for example, gateoxidation. Subsequently, a first polysilicon layer 3 d which will serveas a floating gate layer is deposited on the resultant structure. Ifnecessary, an N-type impurity is doped into the polysilicon layer 3 dby, for example, the phosphor diffusion method. Alternatively, apolysilicon layer 3 beforehand doped with an impurity may be deposited.Subsequently, an SiN film 21 which will serve as a mask is deposited. Inthe following steps which are not shown, resist is coated and patterned,thereby removing, by anisotropic etching, those portions of the SiN film21 which are coated on element-isolating regions, and then removing theresist. The polysilicon layer 3 d, the gate insulating film 2 and thesemiconductor substrate are sequentially etched by anisotropic etching,using the remaining SiN film 21 as a mask, thereby forming trenches 200in the substrate.

Thereafter, as is shown in FIGS. 26A-26C, an insulating film 22 whichconsists of, for example, TEOS is deposited. The resultant structure isflattened by, for example, CMP (Chemical Mechanical Polishing) such thatthe portion of the insulating film 22 which is provided on each portionof the SiN film 21 is removed. Thus, the trenches 200 are each filledwith the insulating film 22.

Then, as is shown in FIGS. 27A-27C, the SiN film 21 is removed by wetetching, and another first polysilicon layer 3 e which will serve as thefloating gate layer is deposited. Subsequently, an N-type impurity, ifnecessary, is implanted into the polysilicon layer by, for example, thephosphor diffusion method. In the following steps which are not shown,resist is coated and patterned such that cell slits are formed in thememory cell section, the first polysilicon layer is removed byanisotropic etching, and the resist is removed.

The FIGS. 27A-27C structure is similar to the FIGS. 5A-5C structureexcept that in the former, the element-isolating regions are defined bythe trenches, and that the polysilicon layer on the activating regionhas a laminated structure of the polysilicon films 3 d and 3 e.

Thereafter, the transistors are formed by the same steps as employed inthe second embodiment. Specifically, the peripheral transistors have asalicide structure in which the gate electrodes are realized by the useof the floating gate layer of the memory cell (the first polysiliconfilms 3 d, 3 e) as shown in FIG. 28A-28C.

If this embodiment includes a select Tr for, the memory cell and a highbreakdown voltage transistor in the peripheral circuit (whichtransistors are not shown), these transistors may be formed by the useof a single gate insulating film which is thicker than the gate oxidefilm (insulating film) 2. Alternatively, it may be modified such thatonly the high breakdown voltage transistor has a gate insulating filmwhich differs from the gate insulating film 2, and the select Tr for thememory cell is realized using the gate insulating film 2. In otherwords, any combination of gate insulating films may be employed if itcan reduce the manufacturing steps such as oxidation.

If the element structure must be flattened for integration, a dummypattern DMY (as shown in FIG. 29) of the same double-layer gatestructure as the memory cell is formed on the element isolating regionnear the peripheral transistors. Thereafter, various steps (which arenot shown) of depositing an interlayer insulating film, forming contactholes and wiring layers, depositing a protect film, etc. are performed.As a result, the non-volatile semiconductor memory device is completed.

FIG. 30 is a sectional view, showing a case where a dummy pattern DMY asshown in FIG. 29 is formed in each element-isolating region adjacent toa corresponding transistor of the peripheral circuit, then an interlayerinsulating film 23 is deposited, and the resultant structure isflattened by, for example, CMP. FIG. 31 is a sectional view, useful inexplaining the difficulty of the flattening treatment which occurs whenthe dummy patterns DMY are not formed. As is understood from FIG. 30,the flattening treatment can be performed easily when the dummy patternsDMY are formed in the element-isolating regions adjacent to thetransistors of the peripheral circuit.

Although in the above-described embodiments, the invention is applied toa NAND EEPROM, it is not limited to it, but also applicable to an EEPROMof a NOR, DINOR, AND, etc. type. A description will now be given of anEEPROM of such a type.

FIG. 32 is a circuit diagram, showing a memory cell array incorporatedin a NAND EEPROM. As is shown in FIG. 32, in the NAND EPROM, abit-line-side select gate (SG1), memory cell groups (memory cell units)connected in series, and a source-line-side select gate (SG2) areconnected in series between a bit line BL and a source line VS. Theselect gate of each select transistor denoted by reference sign SG1 orSG2 and the control gate of each memory cell denoted by reference signCG are connected to the transistors of a peripheral circuit (not shown)for controlling the voltage which is applied for controlling the selecttransistor and the memory cell.

FIG. 33 is a circuit diagram, showing a memory cell array incorporatedin a NOR EEPROM. As is shown in FIG. 33, in the NOR EEPROM, abit-line-side select gate (SG) and one memory cell are connected inseries between a bit line BL and a source line VS perpendicular to thebit line BL. The select gate of each select transistor denoted byreference sign SG and the control gate of each memory cell denoted byreference sign CG are connected to the transistors of a peripheralcircuit (not shown) for controlling the voltage which is applied forcontrolling the select transistor and the memory cell.

FIG. 34 is a circuit diagram, showing a memory cell array incorporatedin a DINOR (Divided NOR) EEPROM. As is shown in FIG. 34, in the DINOREEPROM, memory cells are connected parallel to each other between onesub bit line (sub BL) and a plurality of source lines VS. The sub bitline (sub BL) is connected to a bit line BL via a bit line select gate(SG). The select gate of each select transistor denoted by referencesign SG and the control gate of each memory cell denoted by referencesign CG are connected to the transistors of a peripheral circuit (notshown) for controlling the voltage which is applied for controlling theselect transistor and the memory cell.

FIG. 35 is a circuit diagram, showing a memory cell array incorporatedin an AND EEPROM. As is shown in FIG. 35, in the AND EEPROM, abit-line-side select gate (SG1), memory cell groups (memory cell units)connected parallel to each other, and a source-line-side select gate(SG2) are connected in series between a bit line BL and a source lineVS. The select gate of each select transistor denoted by reference signSG1 or SG2 and the control gate of each memory cell denoted by referencesign CG are connected to the transistors of a peripheral circuit (notshown) for controlling the voltage which is applied for controlling theselect transistor and the memory cell.

As described in each of the embodiments, the non-volatile semiconductormemory devices of the invention are characterized in that gateinsulating films of the same kind are intentionally used in order toreduce the manufacturing steps such as the resist forming step, theoxidation step, etc. The devices are also characterized in that the gateelectrodes of the peripheral transistors are realized using the firstpolysilicon layer (floating gate layer), in order to make thetransistors have a salicide structure without any complicated step andirrespective of whether a conductive layer (e.g. a WSi layer is providedon the control gate layer. In other words, as compared with the casewhere the gate electrodes of the peripheral transistors are formed ofthe control gate layer, gate oxidation steps for the peripheraltransistors can be omitted. Further, since in the invention, an impuritycan be implanted simultaneously into the source and drain regions andthe gate electrode, the conventional resist patterning and impurityimplanting steps, which are performed just for the gate electrodes toproduce surface-channel type peripheral transistors, can be omitted. Inaddition, irrespective of the WSi layer on the control gate layer, thesemiconductor memory device can have a polymetal gate structure in whichanother conductive layer is stacked. These structures enable high speedoperation of the peripheral transistors. In addition, in the invention,the first polysilicon layer can be used as a resistive element of a highresistance while the peripheral transistors can be operated at highspeed.

As described above, the invention can provide a non-volatilesemiconductor memory device which can be manufactured by a simplemanufacturing process and hence at low cost, and wherein the transistorsof the peripheral circuit of the memory can have a salicide structureand a polymetal gate structure which facilitates the employment of ahigh-speed CMOS circuit as a peripheral circuit. The invention can alsoprovide a method for manufacturing the non-volatile semiconductor memorydevice.

Additional advantages and modifications will readily occur to thoseskilled in the art. Therefore, the invention in its broader aspects isnot limited to the specific details and representative embodiments shownand described herein. Accordingly, various modifications may be madewithout departing from the spirit or scope of the general inventiveconcept as defined by the appended claims and their equivalent.

1. A non-volatile semiconductor memory device comprising: a plurality ofmemory cell units each including at least one memory cell formed bystacking a charge storing layer and a control gate layer above asemiconductor substrate in which data is programmed and erased bycharging and discharging the charge storing layer; a plurality of selecttransistors each connected to a corresponding one of the memory cellunits; and first and second transistors each for controlling a voltageto be applied to at least one of the memory cells and the selecttransistor connected thereto, the first transistor having a first: gateinsulating film, and the second transistor having a second gateinsulating film with a different thickness from the first gateinsulating film, wherein a gate insulating film incorporated in thememory cell, a gate insulating film incorporated in the selecttransistor and the first gate insulating film are formed ofsubstantially the same film.
 2. A non-volatile semiconductor memorydevice comprising: a plurality of memory cell units each including atleast one memory cell formed by stacking a charge storing layer and acontrol gate layer above a semiconductor substrate in which data isprogrammed and erased by charging and discharging the charge storinglayer; a plurality of select transistors each connected to acorresponding one of the memory cell units; and first and secondtransistors each for controlling a voltage to be applied to at least oneof the memory cells and the select transistor connected thereto, thefirst transistor having a first gate insulating film, and the secondtransistor having a second gate insulating film with a differentthickness from the first gate insulating film, wherein a gate insulatingfilm incorporated in the memory cell and the first gate insulating filmare formed substantially the same film, and a gate insulating filmincorporated in the select transistor and the second gate insulatingfilm are formed of substantially the same film.
 3. A non-volatilesemiconductor memory device comprising: a plurality of memory cell unitseach including a % least one memory cell formed by stacking a chargestoring layer and a control gate layer above a semiconductor substratein which data is programmed and erased by charging and discharging thecharge storing layer; a plurality of select transistors each connectedto a corresponding one of the memory cell units; and first and secondtransistors each for controlling a voltage to be applied to at least oneof the memory cells and the select transistor connected thereto, thefirst transistor having a first gate insulating film, and the secondtransistor having a second gate insulating film with a differentthickness from the first gate insulating film, wherein a gate insulatingfilm incorporated in the select transistor and the second gateinsulating film are formed of substantially the same film.
 4. Anon-volatile semiconductor memory device according to claim 1, whereinthe second gate insulating film is thicker than the first insulatingfilm.
 5. A non-volatile semiconductor memory device according to claim2, wherein the second gate insulating film is thicker than the firstinsulating film.
 6. A non-volatile semiconductor memory device accordingto claim 3, wherein the second gate insulating film is thicker than thefirst insulating film.
 7. A non-volatile semiconductor memory deviceaccording to claim 3, wherein the second gate insulating film is thinnerthan the first insulating film.
 8. A non-volatile semiconductor memorydevice comprising: a memory cell having a self-aligned double-layer gatestructure which includes a gate insulating film, a first conductorserving as a floating gate layer, a second conductor serving as acontrol gate layer, and an insulating film electrically insulating thefirst and second conductors, the gate insulating film, the firstconductor, the second conductor and the insulating film being formedabove a semiconductor substrate; and a transistor having a gateelectrode which is formed above the semiconductor substrate and has astructure wherein a third conductor differing from the second conductoris stacked on the first conductor.
 9. A non-volatile semiconductormemory device according to claim 8, wherein the gate insulating film ofthe memory cell and a gate insulating film incorporated in thetransistor are formed of substantially the same film.
 10. A non-volatilesemiconductor memory device according to claim 8, wherein the thirdconductor has a resistance lower than the first conductor.
 11. Anon-volatile semiconductor memory device according to claim 8, whereinthe first conductor included in the gate electrode has a conductivitytype identical to that of source and drain regions incorporated in thetransistor, and the transistor has a salicide structure.
 12. Anon-volatile semiconductor memory device according to claim 8, whereinthe third conductor is a metal.
 13. A non-volatile semiconductor memorydevice according to claim 8, wherein the first conductor is one selectedfrom the group consisting of monocrystalline silicon, polysilicon andamorphous silicon.
 14. A non-volatile semiconductor memory deviceaccording to claim 8, further comprising a resistive element with thedouble-layer gate structure, the resistive element including the firstconductor used as a resistor, the second conductor and the insulatingfilm having portions thereof removed from a region of the firstconductor, and the third conductor provided on the region of the firstconductor.
 15. A non-volatile semiconductor memory device according toclaim 14, wherein the region of the first conductor on which the thirdconductor is formed serves as a contact region in the resistive element.16. A non-volatile semiconductor memory device according to claim 8,further comprising an element isolating region adjacent to thetransistor, and a pattern with the double-layer gate structure providedon the element isolating region.
 17. A method of manufacturing anon-volatile semiconductor memory device, comprising the steps of:forming, on a first region of a semiconductor substrate, a self-aligneddouble-layer gate structure which includes a gate insulating film, afirst conductor serving as a floating gate layer, a second conductorserving as a control gate layer, and an insulating film electricallyinsulating the first and second conductors, patterning the firstconductor into a gate electrode of a transistor above a second region ofthe semiconductor substrate; and providing a third conductor on thefirst conductor patterned in the form of the gate electrode above thesecond region.
 18. A method of manufacturing a non-volatilesemiconductor memory device, comprising the steps of: sequentiallyforming, on a semiconductor substrate, a gate insulating film, a firstconductor serving as a floating gate layer, an insulating film, and asecond conductor serving as a control gate layer; patterning the secondconductor, the insulating film and the first conductor in a self-alignedmanner in a first region of the semiconductor substrate, using a singlemask, thereby forming a double-layer gate structure, and removing thatportion of the second conductor which is provided on a second region ofthe semiconductor substrate during the patterning of the secondconductor in the first region; forming a third conductor on the firstconductor in the second region after the patterning of the firstconductor in the first region, such that the first and third conductorsare electrically connected to each other; and patterning the third andfirst conductors into a gate electrode of a transistor in the secondregion.
 19. A method of manufacturing a non-volatile semiconductormemory device, according to claim 17, further comprising the steps offorming an element isolating region adjacent to the transistor, andforming the double-layer gate structure on the element isolating region.20. A method of manufacturing a non-volatile semiconductor memorydevice, according to claim 18, further comprising the steps of formingan element isolating region adjacent to the transistor, and forming thedouble-layer gate structure on the element isolating region.